Analysis of material layers on surfaces, and related systems and methods

ABSTRACT

A method of analyzing film on a substrate comprises receiving surface profile data obtained from measurements of a plurality of discrete regions on a substrate, the plurality of discrete regions comprising one or more film layers; extracting a plurality of parameters from the received surface profile data, the plurality of parameters comprising one or more parameters of the one or more film layers of each of the plurality of discrete regions, wherein the extracting is based on a predetermined pattern for the plurality of the discrete regions on the substrate; and displaying a user interface. The user interface may comprise a plurality of individual graphs each illustrating the one or more parameters of the one or more film layers for a corresponding subset of the plurality of discrete regions, and a composite graph illustrating the one or more parameters of the one or more film layers for each discrete region of the plurality of discrete regions, wherein the composite graph corresponds to the plurality of individual graphs being overlaid together.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of U.S. application Ser.No. 15/954,923, filed Apr. 17, 2018, which claims priority to U.S.Provisional Application No. 62/487,962, filed Apr. 20, 2017, each ofwhich is incorporated herein by reference in its entirety.

TECHNICAL FIELD

Aspects of the present disclosure generally relate to surfaces on whichone or more layers of film are formed, and methods for analyzing suchfilm layers. More specifically, the present disclosure relates toanalysis of film layers on electronic display surfaces in order toachieve quality control for display manufacturing. In addition, aspectsof the present disclosure relate to graphical user interfaces fordisplaying profile data to enhance quality control, inspection, andprocesses for manufacturing of substrates having one or more layers ofthin film thereon, such as, for example, electronic displays.

INTRODUCTION

The section headings used herein are for organizational purposes onlyand are not to be construed as limiting the subject matter described inany way.

The section headings used herein are for organizational purposes onlyand are not to be construed as limiting the subject matter described inany way.

Electronic displays are present in many differing kinds of electronicequipment such as, for example, television screens, computer monitors,cell phones, smart phones, tablets, handheld game consoles, etc. Onetype of electronic display relies on organic light emitting diode (OLED)technology. OLED technology utilizes an organic light-emissive layersandwiched between two electrodes disposed on a substrate. A voltage canbe applied across the electrodes causing charge carriers to be excitedand injected into the organic light-emissive layer. Light emission canoccur through photoemission as the charge carriers relax back to normalenergy states. OLED technology can provide displays with a relativelyhigh contrast ratio because each pixel can be individually addressed toproduce light emission only within the addressed pixel. OLED displaysalso can offer a wide viewing angle due to the emissive nature of thepixels. Power efficiency of an OLED display can be improved over otherdisplay technologies because an OLED pixel only consumes power whendirectly driven. Additionally, the panels that are produced can be muchthinner than in other display technologies due to the light-generatingnature of the technology eliminating the need for light sources withinthe display itself and the thin device structure. OLED displays also canbe fabricated to be flexible and bendable due to the compliant nature ofthe active OLED layers. While OLED displays have been described herein,other types of electronic displays, such as LED, quantum dot,electrophoretic, and electrochromic displays, may also be implemented inaccordance with this disclosure.

Manufacturing of such displays requires precision and quality control inorder to produce a viable result, such as a display having sufficientquality and longevity. An electronic display panel can comprise a seriesof spaced banks or wells for ink deposition. The properties of a displaypanel prior to ink layer deposition, such as bank opening size, bankwall slope, bank depth, bank pitch, and taper distance, can indicatewhether the display can produce a viable product. Other factors caninfluence deposition precision in OLED display manufacturing techniquessuch as, display resolution, fluid properties (e.g., surface tension,viscosity, boiling point) associated with deposited OLED layer materials(e.g., active OLED materials, sometimes referred to as inks), which arecomprised of a combination of OLED layer material and one or morecarrier fluids, and deposition techniques. In addition, after materialdeposition, factors such as film layer thickness, area aperture ratios,film layer uniformity, center to minimum difference, and dried materialvolume can influence luminance, color, and ultimately performance of amanufactured display. Techniques for analyzing electronic panel displaysprior to material deposition and post-deposition can provide qualitycontrol mechanism to improve the manufacturing process for displays,such as OLED displays.

SUMMARY

The present disclosure may solve one or more of the above-mentionedproblems and/or achieve one or more of the above-mentioned desirablefeatures. Other features and/or advantages may become apparent from thedescription which follows.

In accordance with an exemplary embodiment of the present disclosure, amethod of analyzing film on a substrate may comprise receivingthree-dimensional data obtained from measurements of a plurality ofpixels on a substrate, the plurality of pixels comprising one or morefilm layers; extracting a plurality of parameters based on the receivedthree-dimensional data, the plurality of parameters comprising at leastan average thickness for the film layers of the pixels, one or more areaaperture ratios for the film layers of the pixels, and a pitch betweenpixels, wherein the extraction is based on a predetermined pattern forthe pixels on the substrate. The method may further comprise displayinga user interface comprising a graphical representation of one or more ofthe parameters for the one or more film layers of the one or more of thepixels; and dynamically modifying the graphical representation of theone or more parameters in response to user input of the displayed userinterface, the dynamically modifying causing the displayed graphicalimages to appear as continuously changing.

In accordance with another exemplary embodiment of the presentdisclosure, a method of analyzing film on a substrate comprisesreceiving 3-dimensional data obtained from measurements of a substratecomprising a plurality of banks and extracting a plurality of parametersfor the substrate from the received 3-dimensional data comprising one ormore of bank depth, bank pitch, bank height, bank slope and bank openingsize. The method may further comprise comparing the plurality ofparameters to a criteria and determining whether the substrate meets aquality control standard based on the comparing.

According to yet another exemplary embodiment of the present disclosure,a method of analyzing film on a substrate comprises receivingthree-dimensional data obtained from measurements of a plurality ofpixels of a substrate, the plurality of pixels comprising one or morefilm layers and extracting a plurality of parameters from the receivedthree-dimensional data, the parameters comprising at least a height forthe film layers of the plurality pixels, wherein the extraction is basedon a predetermined pattern for the pixels on the substrate. The methodmay further comprise displaying a user interface graphicallyrepresenting at least a height for the film layers of one of theplurality of pixels and displaying a graphical representationillustrating a height for a plurality of different film layers of theone pixel, the plurality of film layers including at least one of anunderlayer, a printed layer, and a difference layer between theunderlayer and the printed layer.

In yet another exemplary embodiment, a method of analyzing film on asubstrate and displaying a dynamic interface based on the analysiscomprises receiving three-dimensional data obtained from measurements ofa plurality of pixels on a substrate, at least a portion of theplurality of pixels comprising one or more film layers and extracting aplurality of parameters from the received three-dimensional datacomprising at least a height for the film layers of the pixels, whereinthe extraction is based on a predetermined pattern for the pixels on thesubstrate. The method may further include displaying a user interfacegraphically representing one or more of the parameters for one or morefilm layers of the one or more of the pixels. The user interface maycomprise a plurality of individual graphs that illustrate one or moreparameters of the film layers for a plurality of pixels, and a compositegraph that illustrate one or more parameters of the film layers of eachof the plurality of pixels, wherein the individual graphs for each ofthe pixels is overlaid onto the composite graph.

In another exemplary embodiment of the present disclosure, a method ofanalyzing film on a substrate comprises receiving three-dimensional dataobtained from measurements of a plurality of pixels on a substrate, theplurality of pixels comprising one or more film layers and extracting aplurality of parameters based on the received three-dimensional data,the plurality of parameters comprising at least an average thickness forthe film layers of the pixels, one or more area aperture ratios for thefilm layers of the pixels, and a pitch between pixels, wherein theextraction is based on a predetermined pattern for the pixels on thesubstrate. The method may further comprise displaying a graphicalrepresentation of one or more of the parameters for one or more filmlayers of the one or more of the pixels, comparing the one or moreparameters to a quality criteria, and determining whether the substratemeets a quality control standard based on the comparing.

Yet another exemplary embodiment of the present disclosure relates to amethod of analyzing film on a substrate for substrate processingcontrol, the method comprising receiving three-dimensional data obtainedfrom measurements of a plurality of pixels on a substrate, the pluralityof pixels comprising one or more film layers and extracting a pluralityof parameters based on the received three-dimensional data, theplurality of parameters comprising at least an average thickness for thefilm layers of the pixels, one or more area aperture ratios for the filmlayers of the pixels, and a pitch between pixels, wherein the extractionis based on a predetermined pattern for the pixels on the substrate. Themethod may further comprise displaying a graphical representation of oneor more of the parameters for one or more film layers of the one or moreof the pixels, comparing the plurality of parameters to thresholdcriteria for each parameter, and adjusting a process of forming the oneor more film layers on the substrate based on the comparing.

Additional objects and advantages will be set forth in part in thedescription which follows, and in part will be obvious from thedescription, or may be learned by practice of the present teachings. Atleast some of the objects and advantages of the present disclosure maybe realized and attained by means of the elements and combinationsparticularly pointed out in the appended claims.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory onlyand are not restrictive of the invention, as claimed. It should beunderstood that the invention, in its broadest sense, could be practicedwithout having one or more features of these exemplary aspects andembodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of this specification, illustrate some exemplary embodiments of thepresent disclosure together with the description, serve to explaincertain principles. In the drawings,

FIG. 1A is a schematic representation of an exemplary pixel arrangementwithin a display panel in accordance with the present disclosure.

FIG. 1B is a schematic depiction of an embodiment of an OLED stack inaccordance with the present disclosure.

FIGS. 2A-2H are graphical user interfaces that includes interactivegraphs, maps, and widgets for displaying profile data of one or morepixels on a substrate in accordance with the present disclosure.

FIG. 3 is a graphical user interface that includes interactive tablesand widgets for displaying profile data of one or more pixels on asubstrate in accordance with the present disclosure.

FIG. 4 is a graphical user interface for defining characteristics of apattern template for banks or pixels on a substrate in accordance withthe present disclosure.

FIG. 5 is a data table illustrating analytical results from profile datafor pixels on a substrate in accordance with the present disclosure.

FIGS. 6A-6E are graphical user interfaces that include interactivetables and graphs for defining a layout and displaying profile data ofone or more pixels on a substrate in accordance with the presentdisclosure.

FIGS. 7A-7F are graphical user interfaces that include interactivegraphs, maps, tables, and widgets for displaying profile data of one ormore ink layers for one or more pixels on a substrate in accordance withthe present disclosure.

FIGS. 8A-8B are graphical user interfaces that include interactivegraphs, maps, and widgets for displaying profile data of one or more inklayers for one or more pixels on a substrate in accordance with thepresent disclosure.

FIGS. 9A-9B and 9D-9H are graphical user interfaces that includeinteractive graphs, maps, and widgets for displaying profile data of oneor more ink layers for one or more pixels on a substrate in accordancewith the present disclosure.

FIG. 9C depicts a method for determining a pinning point for one or morepixels on a substrate in accordance with the present disclosure.

FIGS. 10A-10E are graphical user interfaces that include interactivegraphs, maps, and widgets for displaying luminance values for one ormore pixels on a substrate in accordance with the present disclosure.

FIGS. 11A-11D are graphical user interfaces that include interactivegraphs, maps, and widgets for displaying luminance values and profiledata of ink layers for one or more pixels on a substrate in accordancewith the present disclosure.

FIG. 12 is a graphical user interface for displaying a plurality ofpixels on a substrate in accordance with the present disclosure.

FIGS. 13A-13C are graphical user interface that include interactivegraphs, maps, tables, and widgets for displaying profile data of one ormore banks on a substrate in accordance with the present disclosure.

FIGS. 14A-14D are graphical user interfaces that include interactivegraphs, maps, and widgets for configuring an alignment for one or morepixels on a substrate in accordance with the present disclosure.

FIG. 15 is a schematic representation of a selection of pixels for usein an edge analysis module in accordance with an exemplary embodiment ofthe present disclosure.

FIGS. 16A-16D are graphical user interfaces that include interactivegraphs and widgets for displaying edge data of one or more pixels on asubstrate in accordance with an exemplary embodiment of the presentdisclosure.

FIG. 17 is a screenshot of a graphical user interface that includeinteractive graphs, maps, tables, and widgets for displaying profiledata of pixels on a substrate in accordance with an exemplary embodimentof the present disclosure

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Reference will now be made in detail to various exemplary embodiments ofthe present disclosure, examples of which are illustrated in theaccompanying drawings. Wherever possible, the same reference numberswill be used throughout the drawings to refer to the same or like parts.

For the purposes of this specification and appended claims, unlessotherwise indicated, all numbers expressing quantities, percentages, orproportions, and other numerical values used in the specification andclaims, are to be understood as being modified in all instances by theterm “about,” to the extent they are not already so modified.Accordingly, unless indicated to the contrary, the numerical parametersset forth in the following specification and attached claims areapproximations that may vary depending upon the desired propertiessought to be obtained. At the very least, and not as an attempt to limitthe application of the doctrine of equivalents to the scope of theclaims, each numerical parameter should at least be construed in lightof the number of reported significant digits and by applying ordinaryrounding techniques.

It is noted that, as used in this specification and the appended claims,the singular forms “a,” “an,” and “the,” and any singular use of anyword, include plural referents unless expressly and unequivocallylimited to one referent. As used herein, the term “include” and itsgrammatical variants are intended to be non-limiting, such thatrecitation of items in a list is not to the exclusion of other likeitems that can be substituted or added to the listed items.

Further, this description's terminology is not intended to limit theinvention. For example, spatially relative terms—such as “beneath”,“below”, “lower”, “top”, “bottom”, “above”, “upper”, “horizontal”,“vertical”, and the like—may be used to describe one element's orfeature's relationship to another element or feature as illustrated inthe figures. These spatially relative terms are intended to encompassdiffering positions (i.e., locations) and orientations (i.e., rotationalplacements) of a device in use or operation in addition to the positionand orientation shown in the figures. For example, if a device in thefigures is turned over, elements described as “below” or “beneath” otherelements or features would then be “above” or “over” the other elementsor features. Thus, the exemplary term “below” can encompass bothpositions and orientations of above and below depending on the overallorientation of the device. A device may be otherwise oriented (rotated90 degrees or at other orientations) and the spatially relativedescriptors used herein interpreted accordingly.

As used herein, “pixel” is intended to mean the smallest functionallycomplete and repeating unit of a light emitting pixel array. The term“sub-pixel” is intended to mean a portion of a pixel that makes up adiscrete light emitting part of the pixel, but not necessarily all ofthe light emitting parts. For example, in a full color display, a pixelcan include three primary color sub-pixels such as red, green, and blue.In a monochrome display, the terms sub-pixel and pixel are equivalent,and may be used interchangeably.

One of ordinary skill in the art would generally accept the term “highresolution” to mean a resolution greater than 100 pixels per inch (ppi)where 300 ppi can sometimes be referred to as very high resolution. Oneof ordinary skill in the art would also recognize that pixel densitydoes not directly correlate to the size of the display. Variousexemplary embodiments disclosed herein can be used to achieve highresolution in small and large display sizes. For example, displayshaving a size of about 3 inches to about 11 inches can be implemented ashigh resolution displays. Moreover, displays having larger sizes, suchas television displays up to 55″ and beyond, can also be used withvarious exemplary embodiments described herein to achieve highresolution displays.

As used herein, a layer or structure being “on” a surface includes boththe case where the layer is directly adjacent to and in direct contactwith the surface over which it is formed and the case where there areintervening layers or structures between the layer or structure beingformed over the surface.

Manufacturing of electronic displays, such as OLED displays, requiresprecision and quality control in order to produce a viable result. Anelectronic display panel may comprise a series of spaced banks or wellfor ink deposition. The properties of a display panel prior to ink layerdeposition, such as bank opening size, bank wall slope, bank depth, bankpitch, and taper distance, can indicate whether the display can producea viable product. Other factors can influence deposition precision inOLED display manufacturing techniques such as, display resolution, fluidproperties (e.g., surface tension, viscosity, boiling point) associatedwith the OLED layer material (e.g., active OLED materials) inks, whichare comprised of a combination of OLED layer material and one or morecarrier fluids, and deposition techniques. In addition, after inkdeposition, factors such as ink layer thickness, area aperture ratios,layer uniformity, center to minimum difference, and/or dried ink volumecan influence luminance, color, and ultimately performance of amanufactured display. Techniques for analyzing electronic panel displaysprior to deposition of material for forming film layers and after filmlayer formation can provide quality control mechanisms to improve themanufacturing process and/or for determining whether a product meetsquality standards (e.g., fails inspection).

While OLED displays represent one application that will be discussedherein, those having ordinary skill in the art will appreciate that avariety of applications in which one or more film layers are formed(e.g., in a stack) on a surface can benefit from the various analyses ofthose layers, as described herein. Moreover, the methods and systemsdescribed herein are applicable to a variety of material depositiontechniques and ink jet printing is not intended to be limiting, butrather exemplary. For example, the film layers analyzed in accordancewith the techniques of the present disclosure can be formed from thermalevaporation, organic vapor phase deposition, organic vapor jet printing,spin coating, slot coating, and other material deposition processes forforming film layers with which those of ordinary skill in the art arefamiliar. In addition, the present disclosure can relate to displaytypes other than OLED displays that have film layers thereon, includingbut not limited to, light emitting diode (LED) displays, quantum dotdisplays, electrophoretic displays, and electrochromic displays. Asidefrom electronic displays, the analysis techniques described herein maybe useful for any applications using thin films on a surface, and inparticular for applications in which the uniformity of such film layersimpacts quality or performance. Printed circuitry applications are oneexample of such an application.

Exemplary Electronic Display

FIG. 1A is a schematic top view of an OLED device substrate 10, with anexpanded view 20 showing circuitry for six pixels formed on the surfaceof substrate 10. A single pixel is designated by numeral 30, and is seento consist of separate red, green and blue light generating elements(32, 34 and 36). Additional circuitry (such as depicted by numeral 38)can be formed on the OLED device display substrate to assist withcontrol over generation of light by a respective pixel well.

During the manufacture of an electronic panel display, a pixel is formedto include at least one film layer stack. Taking an OLED display as anexample, the film layer stack may be an OLED film layer stack that canemit light when a voltage is applied. FIG. 1B depicts an embodiment ofan OLED film layer stack that includes between the anode and the cathodea hole injection layer (HIL), a hole transport layer (HTL), an emissivelayer (EML), and an electron transport layer (ETL) combined with anelectron injection layer (EIL). When voltage is applied across the anodeand cathode, light of a specific wavelength is emitted from the EMLlayer, as indicated in FIG. 1B. In various embodiments of systems,devices and methods of the present teachings, the HIL, HTL, EML, andETL/EIL layers depicted in FIG. 1B can be printed using inkjet printing,however such deposition technique is not limiting and other depositiontechniques may be used without departing from the scope of the presentdisclosure. Each of the HIL, HTL, and ETL/EIL OLED stack layers has anink formulation including materials that define the function of thoseOLED stack film layers. As will be discussed in more detailsubsequently, in an exemplary embodiment, a pixel can include threecolor generating elements (e.g., subpixels), where each element has anEML layer that emits a different wavelength of light, for example, butnot limited by, red, green and blue. For various embodiments of an OLEDpixel of the present teachings, each EML layer has an ink formulationincluding an OLED material that can emit in the targeted electromagneticwavelength range. In other embodiments, a monochromatic display (e.g.,with a single subpixel for each pixel) may be implemented, as well asany number or combination of color components and associated pixels.

Electronic Display and Ink Layer Profile Data

Physical properties for an electronic display in accordance with variousembodiments and/or a plurality of film layers deposited onto theelectronic display in accordance with various embodiments may bedetected by any suitable optical or mechanical profilometer or similarinstrument. Examples of instruments and techniques for measuring surfaceprofiles and providing Cartesian space (x, y, z) data include, but arenot limited to 3-dimension optical profilometers, such as thosemanufactured by Bruker, Zygo, Nanovea, Flimetrics, FRT (MicroProf),NanoView, KLA-Tencor, Rtec, Sensofar, and Zeta, laser scanners, such asthose manufactured by Keyence, Novacam, and Salrius, Stylusprofilometers, such as those manufactured by Bruker, Tencor,NanoScience, KLA Tencor, and Dektak, AFM Profilometers, such as thosemanufactured by Bruker, Horiba, Nanosurf, Park Systems, Hitachi, andKeysight, confocal microscopes, such as those manufactured by Keyence,Olympus, Leica, Bruker, and Zeiss, and any other suitable instrument ortechniques. For example, any suitable instrument or technique formeasuring x-y-z data of an electronic display and one or more filmlayers deposited on a surface of the display with a sensitivity of atleast 200 um lateral (x-y) and 100 angstrom in height (z) may beimplemented.

In exemplary embodiments, the three-dimensional (3-D) profile datareceived from the profilometer comprises x-y-z data that describesphysical characteristics for an electronic display comprising aplurality of spaced banks and/or physical characteristics for aplurality of film layers deposited on the electronic display. Theprofile data may be received in any suitable format and from any of thelisted instruments or any other suitable instrument.

In exemplary embodiments, profile data may be received for a pluralityof electronic displays that comprise a plurality of control (unprinted)pixels, and the profile data may include, for example, bank height, banktaper distance, and curvature of a bank. Alternatively or in addition,profile data can be received for a plurality of pixels with film layersand may include, for example, film layer height, aperture ratios, andvolume of dried film material (e.g., dried ink in a printed pixel). Thereceived data may be processed such that analytical data is generatedfor the plurality of electronic displays and the plurality of pixels.For example, once a pattern for pixels or banks is provided, incomingx-y-z data can be automatically analyzed to extract the relevantparameters and analytical data for the display. In some embodiments,this automation is achieved without the need for user intervention orother manual processes, which may considerably reduce processing time tocollect data.

In a further exemplary embodiment, the software can perform imagerecognition from data provided by a user to map the data to thepredefined expected pixel patterns. In this way, the software may adjustby rotation, translation, or both the provided image data to align withthe expected pattern of pixels based on the predetermined patternsprovided as input. Thus, the software can readily identify the dataprovided as data associated with pixels.

Various interfaces, such as graphical user interfaces, described hereinillustrates visual representations of such analytical data.

Interactive Graphical User Interfaces

A plurality of interactive graphical user interfaces may be used inaccordance with various embodiments of this disclosure to displayprofile data for an electronic display and/or film layers on anelectronic display.

FIGS. 2A-2H depict an exemplary embodiment of graphical user interfacesthat include interactive graphs, maps, and widgets for displayingprofile data of one or more pixels on a substrate in accordance with thepresent disclosure. GUI 200A of FIG. 2A is an interactive profileanalysis interface that comprises a heat map of pixels 202, cross-hair204, graphs 206 and 208, data table 210, and heat map of pixels 212.Heat map of pixels 202 illustrates a heat map of film layer height orthickness for the illustrated plurality of pixels according to thedepicted scale. In an example, the outer two pixels comprise controlpixels (e.g., reference wells) on which no film layers have beendeposited, while the inner three pixels represent pixels in which filmlayers have been deposited. The inner three pixels may be referred to asprinted pixels to connote the exemplary embodiment in which the filmlayers are deposited via inkjet printing.

Graphs 206 and 208 correspond to the heat map of pixels 202 andillustrate a graphical representation (Cartesian coordinates) of theheight of the film layers of the pixels. Cross-hair 204 comprises acursor that points to a specific location of the heat map of pixels 202.The film layer height at the specific location pointed to by cross-hair204 is displayed in corresponding graphs 206 and 208. Data table 210comprises analytical information about one or more of the plurality ofpixels corresponding to the heat map of pixels 202. Heat map of pixels212 illustrate area aperture ratios for the plurality of pixelsaccording to the adjacent scale. Interface 214 comprises an interactivewidget with buttons and clickable arrows to manually adjust the dataillustrated in heat map of pixels 202, graphs 206 and 208, data table210, and heat map of pixels 212.

GUI 200B of FIG. 2B is an interactive profile analysis interface thatcomprises a portion of GUI 200A from FIG. 2A. Graphs 206 and 208comprise an indicator, such as line 218, that illustrates the averageheight for the film layers of the printed pixels (e.g., average for thepixels printed an on electronic display). Point 216 on heat map ofpixels 202 illustrates a center height or thickness for the relatedpixel, as illustrated.

GUI 200C and 200D of FIGS. 2C and 2D are additional interactive profileanalysis interfaces that comprise a portion of GUI 200A from FIG. 2A.Radio button 220 is used to select a type of data to be displayed inheat map of pixels 202. In various embodiments, the types of datainclude topographic data, subtracted data, and raw image data. Forexample, the raw image data may comprise the x-y-z (3-D) data measuredby a profilometer for the plurality of pixels, as described in thisdisclosure. In another example, the subtracted data may comprise the rawimage data after a subtraction of control data. For instance, the outerpixels or wells of heat map of pixels 202 can comprise control pixels(or reference wells in the case of pixels defined by bank structuresforming wells) and the subtracted data comprises the measured raw imagedata after subtraction of the data measured for the control pixels orreferences wells. In other words, the subtracted data for one of theinner pixels displayed in the heat map of pixels 202 (i.e., a printedpixel) comprises the measured height of the film layers for the innerpixel minus the measured height for a control pixel or reference well.GUI 200C displays subtracted data for the plurality of pixels while GUI200D displays raw image data for the plurality of pixels.

GUI 200E and 200F of FIGS. 2E and 2F are additional interactive profileanalysis interfaces that comprise a portion of GUI 200A of FIG. 2A.Cross-hair 204 can be an adjustable cursor that points to a specificlocation of the heat map of pixels 202 and can be manipulated by a userof the interface. For example, cross-hair 204 comprises two orthogonallines such that a user can click and drag cross-hair 204 to any locationon heat map of pixels 202. GUI 200E shows cross-hair 204 in the centerof the center pixel. Cross-hair 204 extends to graphs 206 and 208 suchthat the lines of the cross-hair intersect with the graphed lines thatillustrate film height. In this example, the intersection of cross-hair204 with graph 206 shows the precise location on graph 206 thatcorresponds with the location of cross-hair 204 on heat map of pixels202. The intersection of cross-hair 204 and graph 206 illustrates thefilm height for the location of cross-hair 204 on heat map of pixels202. The intersection of cross-hair 204 and graph 208 illustrates asimilar correspondence between graph 208 and the location on heat map ofpixels 202.

In the illustrated embodiment, graph 204 displays film height for theplurality of pixels from heat map of pixels 202 over the length of theheat map. For example, graph 204 displays film height for the pluralityof pixels across the length of the heat map (e.g., x-axis) based on they-coordinate specified by the location of cross-hair 204. Similarly,graph 206 displays film height for the plurality of pixels from heat mapof pixels 202 over the width of the heat map. For example, graph 206displays film height for the plurality of pixels across the width of theheat map (e.g., y-axis) based on the x-coordinate specified by thelocation of cross-hair 204.

In some embodiments, as cross-hair 204 is moved by a user, theintersection of cross-hair 204 with graphs 206 and 208 also moves suchthat the GUI appears to continuously change along with the movement ofcrosshair 204. In another example, as cross-hair 204 is moved by a user,graphs 204 and 206 update the graphed film height according to thecross-hair location such that the GUI appears to continuously changealong with the movement of crosshair 204. In GUI 200F, cross-hair 204has been moved by a user from the center of the center pixel to a gapbetween pixels. As can be seen by the intersections of cross-hair 204and graphs 206 and 208, the corresponding ink height for the gap betweenpixels is zero.

Data table 210 comprises analytical information about one or more of theplurality of pixels corresponding to the heat map of pixels 202. GUI200G and 200H of FIGS. 2G and 2H are additional interactive profileanalysis interfaces that comprises a portion of GUI 200A of FIG. 2A.Data table 210 comprises analytical information about one or more of theplurality of pixels corresponding to the heat map of pixels 202 and/or aset of printed pixels (e.g., a set of printed pixels on a particularpanel of an electronic display). For example, data table 210 illustratesaverage center thickness or height, percent of area aperture ratioswithin a threshold distance (e.g., +/−10 nm, 5 nm, 2 nm, 1 nm, and thelike), center ink height of a pixel to minimum ink height for the pixeldifference, and dried material (e.g., ink) volume in a bank or well fora pixel. Radio button 224 selects the type of data to be displayed indata table 210. For example, data for a standard pixel can be displayedas illustrated in GUI 200G, or data for an average for a plurality of aset of pixels (e.g., a set of printed pixels on a particular panel of anelectronic display) can be displayed as illustrated in GUI 200H. Whendata for an average for a plurality of a set of pixels is displayed,analytical data for the set may also be displayed in data table 210. Forexample, standard deviation data and coefficient of variation (e.g.,standard deviation/average) data may be displayed, as illustrated in GUI200H.

An extended analysis of the data displayed in data table 210 may also bedisplayed, as illustrated in GUI 300 of FIG. 3. FIG. 3 depict oneexemplary embodiment of a graphical user interface that includesinteractive tables and widgets for displaying extended profile data ofone or more pixels on a substrate in accordance with the presentdisclosure.

GUI 300 displays two data tables that are similar to data table 210 ofFIG. 2A. The first and second data tables may display data for anaverage of a set of pixels or data for a standard pixel based on theselection of radio button 302. In an exemplary embodiment, the firsttable displays data that is relative to an actual center film height orthickness of a pixel and the second table may display data that isrelative to a target center film height or thickness for a pixel. Inother words, the percentage area aperture ratios displayed in the firstdata table may be relative to the actual film center height or thicknessfor a pixel and the area aperture ratios displayed in the second datatable may be relative to the target film center height or thickness fora pixel. For both the first and second data table, GUI 300 may alsodisplay a threshold height difference, where a threshold percentage(e.g., 95% or the like) of data from pixels falls within the thresholdheight difference for the average center film height or thickness. Thetarget thickness is editable and may be input into box 304 by a user.

FIG. 4 depicts one exemplary embodiment of a graphical user interfacefor defining characteristics of a pattern template for banks or wells ona substrate in accordance with the present disclosure. For example, anelectronic display panel can comprise a pattern of banks or wells suchthat pixels can be printed onto the display (e.g., one or more filmlayers can be deposited on the surface of the display). GUI 400illustrates an interface such that a template may be input that definesthe pattern of banks or wells for an electronic display. Data table 402includes defining parameters for a pattern such as a name, imagemagnification, number of bank or well rows, number of bank or wellscolumns, x-axis (horizontal) pitch distance, y-axis (vertical) pitchdistance, bank or well width and height, corner radius, a binaryparameter with regard to whether the pattern includes empty (e.g.,control or unprinted) banks or wells, if empty banks or well areincluded, a list of such locations for such empty banks or wells, anumber of pixels for a standard profile, a threshold distance forfinding an edge of the electronic display, and/or a border width. Thedefining parameters for a pattern may be automatically generated basedon the x-y-z data received from a profilometer or other instrument for agiven electronic display panel and the automatically generatedparameters may be editable by a user. In another example, the parametersfor a pattern may be input by a user. The pattern may also be saved suchthat subsequently received data for electronic displays (e.g., filmheight for pixel data, bank or well profile, data, and the like) may beanalyzed based on the pattern or such that a profilometer can beconfigured to determine profile data for a given electronic display thatcorresponds to the saved pattern. Those having ordinary skill in the artwould appreciate that the pattern recognition for pixels may beaccomplished for surfaces that do not have bank structure definingwells, but rather have material layers deposited in a patterned mannerwith spacing between adjacent pixels. In such exemplary embodiments,rather than defining bank parameters, spacing between the pixels can bedefined and the remaining aspects of the pattern recognition can occur.

FIG. 5 depicts one exemplary embodiment of a data table illustratinganalytical results from profile data for pixels on a substrate inaccordance with the present disclosure. Data table 500 illustratesanalytical results for x-y-z data received from a plurality ofelectronic display panels. For example, data table 500 may include anelectronic display panel ID number, a sequence number that correspondsto a pattern template for banks or wells of the panel, a pixel averagecenter film height or thickness for the panel, a whole pixel averagefilm height or thickness for the panel, percent of area aperture ratioswithin a threshold distance (e.g., +/−10 nm, 5 nm, 2 nm, 1 nm, and thelike) for the panel, average center film height of a pixel to minimumfilm height for the pixel difference for a panel, and average driedmaterial (e.g., dried ink) volume in a bank or well for a pixel of thepanel.

In an embodiment, one or more software interfaces in accordance withvarious embodiments may receive x-y-z data for a plurality of electronicdisplays (e.g., with or without film layers deposited in pixels). Thex-y-z data may be analyzed such that profile data, such as the datadisplayed in data table 500, may be generated for the plurality ofelectronic displays. In an example, a file that comprises such x-y-zdata can be processed in a time between 1 second and 5 minutes,depending on the file size. The developed database of profile data forthe electronic displays may then be analyzed to enhance themanufacturing process.

FIGS. 6A-6E depict an exemplary embodiment of graphical user interfacesthat include interactive tables and graphs for defining a layout anddisplaying profile data of one or more pixels on a substrate inaccordance with the present disclosure. FIG. 600A illustrates a grid 602of individual pixel graphs adjacent to a composite pixel graph 604. Grid602 of individual pixel graphs displays film height or thickness forindividual pixels while composite graph 604 displays an overlay of thefilm height or thickness from grid 602. In various exemplaryembodiments, the individual graphs of grid 602 may display film heightor thickness in different line colors, and composite pixel graph 604 maygraph film height or thickness such that the line color of graphed filmheights corresponds to the color displayed for the individual graphswithin grid 602.

In various exemplary embodiments, grid 602 is configurable by a user.For example, FIG. 6B illustrates an interface 600B for selecting anumber of rows and a number of columns for grid 602. FIG. 6C and GUI600C illustrate a grid with a single row and 9 columns. FIG. 6D and GUI600D illustrate a grid with a 9 rows and single column. In variousembodiments, a user may select one of the individual graphs of a grid(e.g., by clicking the graph), and the graphed line from composite pixelgraph 604 that corresponds to the selected individual graph ishighlighted based on the selection.

FIG. 6E and GUI 600E illustrates a grid with 4 rows and a single column.GUI 600E also illustrates an error or abnormality detection of thepresent embodiment based on graph 606 and composite pixel graph 608. Forexample, graph 606 displays film height or thickness data from aparticular pixel in a particular color. The graphed film height orthickness that corresponds to the particular color displayed incomposite pixel graph 608 shows that the height or thickness for thisparticular pixel deviates greatly from the height or thickness for theother pixels displayed in the composite graph. Accordingly, a user canreadily detect an error or abnormality for the particular pixel graphedaccording to the particular color.

FIGS. 7A-7F depict an exemplary embodiment of graphical user interfacesthat include interactive graphs, maps, tables, and widgets fordisplaying profile data of one or more film layers for one or morepixels on a substrate in accordance with the present disclosure. GUI700A of FIG. 7A is an interactive overlay interface that comprisesselectable data table 702, graphs 704 and 706, heat map of a pixel 708,and cross-hair 710. Selectable data table 702 illustrate a plurality offilm layers deposited on the electronic display panel to form the pixelrepresented in heat map of a pixel 708.

For example, GUI 700A illustrates five film layers that form theillustrated pixel, and each of the five layers is selected for displayin graphs 704 and 706. Data table 702 also illustrates a legend therelates a particular data layer to a particular color, and graphs 704and 706 display the height or thickness for a layer in the correspondingcolor for the layer. A user may also select a layer for data to bedisplayed by heat map of a pixel 708. Heat map of a pixel 708 may besimilar to heat map of pixels 202 from FIG. 2A.

In an example, GUI 700B of FIG. 7B illustrates radio button 712, whichcan be used to select whether heat map of a pixel 708 displaystopographic data or subtracted data (e.g., data received from aprofilometer for the pixel minus data from a control pixel). GUI 700B ofFIG. 7B shows a check alignment selection for radio button 712, whichcan be used to show a plurality of the layers that form the relevantpixel in heat map of a pixel 708 to check the alignment for the layers.

Heat map of a pixel 708 may also include a scale for the heat map, asillustrated. GUI 700C of FIG. 7C illustrates radio button 714, which canbe used to select an automatic scale or a manual scale. The automaticscaling may select a scale based on the data for the layers of the pixelreceived from the profilometer. GUI 700D of FIG. 7D shows manual scale716, where a user may manually input a scale in boxes 718 and 720.

GUI 700E of FIG. 7E illustrates cross-hair 710. Cross-hair 710 may besimilar to cross-hair 204 of FIG. 2A. For example, cross-hair 710 may beselectable by a user such that the cross-hair may be moved to any otherlocation on heat map of a pixel 708. Graphs 704 and 706 each comprise anindication for the location corresponding to the location of cross-hair710 on the heat map of a pixel 708, and the indication moves along withthe movement of cross-hair 710. For example, as cross-hair 710 is movedby a user, the indication corresponding to cross-hair 710 displayed ongraphs 704 and 706 also moves such that the GUI appears to continuouslychange along with the movement of crosshair 710. GUI 700F of FIG. 7Fillustrates cross-hair 710 that has been moved to a new location on heatmap of a pixel 708.

FIGS. 8A-8B depict an exemplary embodiment of graphical user interfacesthat include interactive graphs, maps, and widgets for displayingprofile data of one or more film layers for one or more pixels on asubstrate in accordance with the present disclosure. GUI 800A of FIG. 8Ais an interactive overlay interface that comprises heat map of a pixel802, graphs 804 and 806, and cross-hair 808. Heat map of a pixel 802,graphs 804 and 806, and cross-hair 810 may be similar to heat map ofpixels 202, cross-hair 204, and graphs 206 and 208 of FIG. 2A. Forexample, graphs 804 and 806 may display film layer height or thicknesscorresponding to the pixel data displayed in heat map of a pixel 802.Cross-hair 808 may comprise a cursor that is movable by a user such thatthe intersection of cross-hair 808 and graphs 804 and 806 illustrate afilm height for the location on the heat map of a pixel pointed to bycross-hair 808.

Radio button 810 may be used to select layer data that is displayed inheat map of a pixel 802 and graphs 804 and 806. For example, GUI 800Aillustrates a selection of layers HIL, HLT, and EML, and each of thethree layers is displayed in heat map of a pixel 802 and graphs 804 and806. The individual layers may each correspond to a color for thegraphed lines displayed in graphs 804 and 806.

FIG. 8B illustrates error or abnormality detection of the presentembodiment based on heat map of a pixel 802 and graph 804. For example,heat map of a pixel 802 illustrated in FIG. 8B displays a single layerHIL for the related pixel and shows an abnormality 812. Graph 804 ofFIG. 8B illustrates a corresponding abnormality 814. This abnormalityshown in FIG. 8B indicates a lack of uniformity for the HIL ink layer ofthe represented pixel. Such a lack of uniformity can cause performanceerrors and otherwise reduce the effective of an electronic display, suchas an OLED display. FIG. 8B illustrates how the interactive graphicaluser interface enables detection of such an error.

In an exemplary embodiment, the error illustrated in FIG. 8B may beautomatically flagged for review as a potential error by automatedtechniques. For instance, it may be determined that a change in slopefor one of more of the graphed lines from graph 804 exceeds an errorcriteria (e.g., slope threshold). In another example, it may bedetermined that multiple changes in slopes (e.g., based on the spikeassociated with abnormality 814) over a predetermined window (e.g.,x-axis range) exceed an error criteria. Based on the automatic flagging,an indicator may be displayed related to abnormality 814, and a user mayreview the remaining data for the pixel to determine whether theabnormality results in a quality error.

FIGS. 9A-9H depict an exemplary embodiment of graphical user interfacesthat include interactive graphs, maps, and widgets for displayingprofile data of one or more film layers for one or more pixels on asubstrate in accordance with the present disclosure. GUI 900A of FIG. 9Ais an interactive pinning point interface that comprises heat map of apixel 902, graphs 904 and 906, and cross-hair 908, and alignmentinterface 910. Heat map of a pixel 902, graphs 904 and 906, andcross-hair 910 may be similar to heat map of pixels 202, cross-hair 204,and graphs 206 and 208 of FIG. 2A. For example, graphs 904 and 906 maydisplay film layer height or thickness corresponding to the pixel datadisplayed in heat map of a pixel 902. Cross-hair 908 may comprise acursor that is movable by a user such that the intersection ofcross-hair 908 and graphs 904 and 906 illustrate a film height for thelocation on the heat map of a pixel pointed to by cross-hair 908.

Heat map of a pixel 902 may display a cross-section for a given pixeland graphs 904 and 906 may display film height or thickness for aplurality of layers of the given pixel. A pinning point may illustratethe shape of a film layer of an electronic display (e.g., a film layeron top of an underlayer or a base surface of a substrate). For example,FIG. 9A illustrates a distribution of materials after drying inside atop edge of a pixel or subpixel. Heat map of a pixel 902 shows theheight or thickness of film layers, and height or thickness profileinformation at any location of heat map of a pixel 902 can be determinedby navigating with the crosshair 908.

In some embodiments, the pinning point can be defined as the point atwhich a film layer (e.g., a printed film layer) and an underlyingsurface (which may be of either a film layer underlying the film layerof interest or a base surface of a substrate on which the layers aredeposited) converge. For example, a layer may correspond to one or moreof the OLED stack film structures that include the HIL layer, HTL layer,EML layer, ETL layer, and EIL layer, as illustrated in FIG. 1B. Theunderlayer may correspond to the layer beneath the film layer for whichthe pinning point is being analyzed within the OLED stack or, in someinstances, the base surface of the substrate of the OLED stack when nounderlayer is beneath the film layer being analyzed. The pinning pointfor an individual layer may be the location at which the individuallayer being analyzed converges with the respective underlayer orconverges with the base surface when no such underlayer for theindividual layer is present. Other embodiments that comprise differentcombinations of layers, different layers, or any other suitableconfiguration may similarly be implemented.

GUI 900B of FIG. 9B illustrates pinning point 912. This can be seen ongraph 904 as the point at which the film layer being analyzed(corresponding to a first line color (gray scale coloring being depictedin the drawings)) and the underlayer (correspond to a second line color)converge. Such a convergence can be considered a first indication of thepinning point. A second indication of the pinning point can be seen asthe point at which the subtraction line (corresponding to a third linecolor), or the line comprising the subtraction of the underlayer fromthe deposited (e.g., printed) film layer, reaches zero, or pinning point914. Lastly, the third indication may be from the heat map of a pixel902, which confirms that the location corresponding to the identifiedpinning points 912 and 914 does not comprise a film layer height orthickness. Accordingly, the graphs, heat maps, and interfaces displayedin GUI 900B readily enable detection of a pinning point for a layer ofinterest of a pixel.

FIG. 9C illustrates an exemplary method for determining a pinning pointin accordance with an embodiment, which will be describe in connectionwith layers that are deposited via printing, although those of ordinaryskill in the art would appreciate that the layers can be deposited usinga variety of other techniques as discussed herein. At step 920, theunprinted bank or well data (the data relating to a base surface withoutany film layers thereon) may be leveled. For example, interface 910 maybe used to select a given layer (e.g., the base surface of a substrate),align the selected layer, and tilt the selected layer until the layerdata is leveled. At step 922, a similar leveling may be performed forthe underlayer and the deposited film layer (e.g., printed layer)overlying the underlayer.

At step 924, a height of the unprinted layer may be set. At step 926, aheight of the underlayer and deposited (e.g., printed) layer may be set.At step 928, a convergence of the underlayer or unprinted layer and theprinted layer may be identified as the pinning point. For example, asubtraction of the printed layer from the unprinted layer or underlayerallows for the calculation of net material distribution in an area ofinterest. This effectively shows the edge boundary of the depositedmaterials (e.g., inkjet materials), otherwise known as the pinningpoint.

Heat map of a pixel 902 may also include a scale for the heat map, asillustrated. GUI 900D of FIG. 9D illustrates scale 930, where a user canmanually input a scale in boxes 932 and 934. Scale 930 may be similar toscale 716 of FIG. 7D. GUI 900E of FIG. 9E illustrates a portion of FIG.9A. Selectable interface 936 can be used by a user to select the data tobe displayed in heat map of a pixel 902 and graphs 904 and 906. Forexample, data for one or more of the base surface (e.g., unprintedlayer), the underlayer, the deposited film layer (e.g., printed layer),and the difference layer (e.g., printed layer—underlayer (if any)) forthe given pixel may be displayed.

GUI 900E illustrates that each of the unprinted layer, the underlayer,the deposited (e.g., printed layer), and the difference layer have beenselected for display in graphs 904 and 906 and that the base surface(e.g., unprinted layer) has been selected for display for the heat mapof pixel 902, as indicated by radio button 938. GUI 900F of FIG. 9Fillustrates that the deposited film layer (e.g., printed layer) has beenselected for display for the heat map of pixel 902, as indicated byradio button 938. Cursor height 940 provides an indication of the heightor thickness for selected film layers at a location of the displayedpixel pointed to by cross-hair 908.

GUIs 900G of FIG. 9G and 900H of FIG. 9H also illustrate a portion ofFIG. 9A. GUIs 900G and 900H illustrate cross-hair 908 moving from afirst location to a second location, for example based on user inputthat moves the cross-hair. The movement of cross-hair 908 andcorresponding changes to graphs 904 and 906 may be similar to otherembodiments described within this disclosure, such as cross-hair 204 andgraphs 206 and 208 of FIG. 2A.

FIGS. 10A-10E depict an exemplary embodiment of graphical userinterfaces that include interactive graphs, maps, and widgets fordisplaying luminance values for one or more pixels on a substrate inaccordance with the present disclosure. GUI 1000A of FIG. 10A is a coloranalysis interface that comprises selectable region 1002, selectionbutton 1004, pixel display 1006, channel selector 1008, luminance slider1010, heat maps 1012, 1014, and 1016, and color graph 1018. A user maydefine a region 1002 for analysis within the illustrated pixel displayof GUI 1000A. Once a region has been defined, selection button 1004 maybe clicked to analyze the selected region.

GUI 1000B illustrates selected region 1002 that has been analyzed. Pixeldisplay 1006 illustrates a color display for the selected region, forinstance the selected pixel. Channel selector 1008 comprises a radiobutton to be used to select the color channel to be displayed in region1006. For example, the color channels may comprise red, green, blue, ora combination of these. GUI 1000B illustrates a selection of acombination of red, green, and blue. Luminance slider 1010 may be usedto select a luminance threshold for display in heat maps 1012, 1014, and1016, which may display luminance data, CIEx data, and CIEy data for theselected region or selected pixel, respectively. Graph 1018 may displayCIE (International Commission on Illumination) color data for theselected region or selected pixel.

GUI 1000C of FIG. 10C illustrates a luminance slider 1010. A user mayadjust luminance slider 1010 to select a particular luminance threshold.Based on the selected luminance threshold, heat map 1012 displaysluminance data that meets or exceeds the selected luminance threshold.For instance, regions of heat map 1012 that do not meet or exceed theselected threshold luminance may be filtered from the heat map. GUI1000D of FIG. 10D illustrates a change in location of luminance slider1010, and thus an adjusted threshold to be used to display luminancedata for heat map 1012. The adjustment to luminance slider 1010 maychange the display of heat map 1012 in real time, and thus GUI 1000C mayappear to be continuously changing as luminance slider 1010 is adjusted.In an embodiment, the selected luminance threshold may also be used tofilter data from one or more graphical representations or data tables.

GUI 1000E of FIG. 10E illustrates pixel display 1006 and channelselector 1008. Channel selector 1008 comprises a radio button to be usedto select the color channel to be displayed in region 1006. For example,the color channels may comprise red, green, blue, or a combination ofthese. GUI 1000E illustrates a selection of the red color channel.

FIGS. 11A-11E depict an exemplary embodiment of graphical userinterfaces that include interactive graphs, maps, and widgets fordisplaying luminance values and profile data of film layers for one ormore pixels on a substrate in accordance with the present disclosure.GUI 1100A of FIG. 11A is an optical (color image) and profilometerinterface that comprises selectable region 1102, pixel display 1104,luminance slider 1106, heat map 1108, display selector 1110, cross-hair1112, selectable region 1114, pixel display 1116, and graphs 1118 and1120. A user may define a region 1102 for analysis within theillustrated pixel display of GUI 1100A.

In an example, region 1114 may correspond to selected region 1102. Pixeldisplay 1104 illustrates a luminance display for the selected region orthe selected pixel. In the illustrated embodiment, region 1102 and pixeldisplay 1104 correspond to optical image data displays, such asluminance and color data, and region 114 and pixel display 116correspond to profilometer 3-D pixel data, such as height or thicknessfor film layers.

Luminance slider 1106 may be used to adjust a luminance threshold forheat map 1108. A user may adjust luminance slider 1106 to select aparticular luminance threshold. Based on the selected luminancethreshold, heat map 1108 displays luminance data that meets or exceedsthe selected luminance threshold. For instance, regions of heat map 1108that do not meet or exceed the selected threshold luminance may befiltered from the heat map. Luminance slider 1106 may be adjusted by auser such that detected noise for a given pixel is filtered from heatmap 1108 based on the selected luminance threshold. The adjustment toluminance slider 1106 may change the display of heat map 1108 in realtime. Display selector 1110 may change the display of heat map 1108 todisplay one or more of luminance, CIEx color data, and CIEy color data.In an embodiment, the selected luminance threshold may also be used tofilter data from one or more graphical representations or data tables.

Graphs 1118 and 1120 display an overlay of optical image data andprofilometer 3-D data for the selected region or selected pixel. Forexample, graphs 1118 and 1120 display two graphed lines, eachcorresponding to optical image data, such as luminance, and profilometer3-D data, such as film layer height, for the selected pixel. Inexemplary embodiments, the graphed optical image data may comprise CIExcolor data or CIEy color data, for instance based on the data selectedfor display by display selector 1110.

GUI 1100B of FIG. 11B illustrates display selector 1110, configurationselector 1122, and heat maps 1124, 1126, and 1128. A user may adjustluminance slider 1010 to select a particular luminance threshold.Display selector 1110 may change the display of heat map 1108 to displayone or more of luminance CIEx color data, and CIEy color data.Configuration selector may be used to portion the selected region orpixel such that a portion displays optical image data while a portiondisplays profilometer 3-D data. For example, heat map 1124 displaysluminance data, heat map 1126 displays half luminance data and half filmlayer height data, split vertically, and heat map 1128 displays halfluminance data and half film layer height data, split horizontally.Other suitable techniques for portioning the illustrated pixel may alsobe utilized.

GUIs 1100C of FIG. 11C and 1100D of FIG. 11D illustrate a portion ofFIG. 11A. 1100C and 1100D illustrate cross-hair 1112 moving from a firstlocation to a second location, for example based on user input thatmoves the cross-hair. The movement of cross-hair 908 and correspondingchanges to graphs 904 and 906 may be similar to other embodimentsdescribed within this disclosure, such as cross-hair 204 and graphs 206and 208 of FIG. 2A. For example, movement of cross-hair 1112 may adjustthe luminance data (CIEx data or CIEy data) and film layer height datadisplayed in graphs 206 and 208 such that the graphs display datacorresponding to the new location for cross-hair 1112.

FIG. 12 depicts one exemplary embodiment of a graphical user interfacesfor displaying a plurality of pixels on a substrate in accordance withthe present disclosure. For example, a file comprising profilometerand/or optical data for a plurality of pixels may be loaded, and apreview of the data may be displayed, as illustrated in GUI 1200.

FIGS. 13A-13C depict an exemplary embodiment of graphical userinterfaces that include interactive graphs, maps, tables, and widgetsfor displaying profile data of one or more banks on a substrate inaccordance with the present disclosure. GUI 1300A of FIG. 13A is a bankanalysis interface that comprises graphs 1302, 1304, 1306, and 1308,scatter plots 1310, 1312, 1314, and 1316, legend 1318, bank display1320, boundaries 1322, and data table 1324. In an embodiment, anelectronic display such as a panel can comprise a pattern of banks orwells such that pixels can be formed (e.g., via deposition of one ormore film layers) onto the display (e.g., one or more ink layers can beprinted in stacks on the surface of the display). Such an electronicdisplay may be analyzed, for instance using a profilometer, such thatthe characteristics for the pattern of banks can be determined. In anembodiment, an electronic display may be analyzed to determine thesecharacteristics based on a predetermined pattern for the electronicdisplay, such as a pattern defined with reference to FIG. 4.

In various embodiments, a plurality of banks for the electronic displaymay be analyzed. For example, graphs 1302, 1304, 1306, and 1308 mayillustrate graphed heights for a plurality of banks from the perspectiveof the left side of the bank, right side of the bank, bottom of thebank, and top of the bank, respectively. Scatter plots 1310, 1312, 1314,and 1316 may illustrates plotted data values for the plurality of banksincluding plotted bank height, taper distance, slope, and bank openingarea, respectively. Legend 1318 may associate a particular color (orshade or hatching, etc.) with a particular bank, and the correspondinggraphed lines and plotted points for the particular bank comprise theparticular color (or shade or hatching, etc.). Bank display 1320 maydisplay an orientation for the plurality of banks and boundaries 1322illustrates the boundaries for the banks used to determine bankcharacteristics (e.g., bank height, width, and the like).

Data table 1324 displays bank characteristics for the individual banks.Graphs 1302, 1304, 1306, and 1308 and scatter plots 1310, 1312, 1314,and 1316 may graphically display the data from data table 1324. Datatable 1324 may comprise individual columns that indicate an individualbank and the orientation (e.g., left, right, bottom, top) for the data.For example, measurements data may be received or determined atdifferent locations of the bank (e.g., left, right, bottom, and top)such that the data may be standardized and to determine pixel orsubpixel symmetry or asymmetry. The data for the banks comprises atleast bank height, taper distance, slope (e.g., at the half-way point),max slope, average slope, ITO or aperture width, ITO or aperture length,ITO or aperture area, bank aperture width, and bank aperture length.

For example, FIG. 13B and GUI 1300B illustrates graphs 1302 and 1304.Based on the left and right bank measurements, as illustrated, a widthfor the top of a bank, distance 1330 or bank aperture width, and thebottom of the bank, distance 1332 or ITO width, can be determined.Similarly, based on distances 1334, 1336, and 1338, and the righttriangle the measurements form, a halfway point for a bank can bedetermined, and the slope at the halfway point, 1340, may be calculated.In exemplary embodiment, distance 1334 may comprise taper distance forthe bank, distance 1336 may comprise a bank height, and distance 1338may comprise an average slope for the bank.

FIG. 13C illustrates how the bank measurements can be edited by a user.For example, boundaries 1322 may be selected by a user and moved suchthat the boundaries used to determine the bank measurements areadjusted. Accordingly, boundaries on graphs 1302, 1304, 1306, and 1308,such as boundary 1350, are also adjusted. Based on the adjustment,measurement values, such as values 1352 and 1354, are adjusted. Datatable 1324 similarly reflects the adjusted values for the measurementsof the banks based on the adjusted boundaries.

Interface 1356 also can be used to configure profile data, such as thedata illustrated in data table 1324, for defining the parameters of abank. For instance, a vertical threshold (threshold height) for defininga bank may be input or edited using interface 1356 such that data with aheight (y-axis data) above the threshold is analyzed as data defining abank edge. Such a bank edge (e.g., where a height meets the verticalthreshold) may comprise a reference point for defining the bankparameters and the aperture parameters. For example, horizontalthresholds for defining a bank and aperture may be input or edited usinginterface 1356. Relative to the defined bank edge (e.g., defined by wayof the vertical threshold) the threshold “measure towards bank” maydefine a boundary from the bank edge such that data within the boundaryis analyzed as data defining the bank. Similarly, the threshold “measuretowards ITO” may define a boundary from the bank edge such that datawithin the boundary is analyzed as data defining the aperture.

FIGS. 14A-14D depict an exemplary embodiment of graphical userinterfaces that include interactive graphs, maps, and widgets forconfiguring an alignment for one or more pixels on a substrate inaccordance with the present disclosure. GUI 1400A of FIG. 14Aillustrates a widget for manual alignment of a pixel. For example, auser may click the arrows of widget 1402 to manually move the visualrepresentation of the data for pixel 1404. Once the pixel is aligned,the data for the pixel may be corrected in accordance with the receivedalignment and analyzed. Similarly, GUI 1400B of FIG. 14B illustrates awidget for manual rotation of a pixel. For example, a user may click thearrows of widget 1406 to manually rotate the visual representation ofthe data for the pixels illustrated in display 1408. Once rotated, as indisplay 1410, the data for the plurality of pixels may be corrected inaccordance with the received rotation and analyzed.

GUIs 1400D and 1400C of FIGS. 14C and 14D illustrates a widget formanual tilt of a pixel. For example, a user may click the arrows ofwidget 1412 to manually tilt the visual representation of the data forthe pixels illustrated in displays 1414 and 1416. For example, display1414 indicates a tilt for the data of the plurality of pixels that isnot anticipated given data expected to be received from a profilometerfor printed pixels on an electronic display. Once the data has beentilted, as illustrated in GUI 1400D, the data for the plurality ofpixels may be corrected in accordance with the received tilt andanalyzed.

Various exemplary embodiments of the present disclosure provide an edgeanalysis module for displaying and analyzing profiling data for a seriesof pixels. Due to the nature of manufacturing processes for varioustypes of substrates, such as for displays as discussed herein, pixels atthe edge of the active display area on the substrate may have slightlydifferent performance than those closer to the center of the display.Such differences can result in poor performance and/or undesirablevisual artifacts for an observer viewing the display. FIGS. 15-16Ddepict an exemplary embodiment relating to a graphical user interfacethat include interactive graphs and widgets for displaying and analyzingedge effects data for a display for which profiling data has beenobtained. With reference to FIG. 15, a schematic of a display with aplurality of pixels P is depicted. As shown, in accordance with the edgeanalysis module, a user can select a line of adjacent pixels (4 suchlines denoted by the shading and corresponding arrows being shown), andthe software processes each pixel in the sequence to analyze variousdata based on the profiling data as discussed above. For example,various parameters, such as, for example, pixel asymmetry, whole pixelaverage thickness, percent of area aperture ratios within a thresholddistance (e.g., +/−10 nm, 5 nm, 2 nm, 1 nm, and the like), center totrough distance, and center thickness can be calculated based on theprofiling measurements received for reach of the selected pixels, andthe data for the selected series can be plotted in a graph 1601, asshown in FIG. 16A for example. The particular graph type to be displayedcan be selected using the edge analysis module interface from adrop-down menu 1602, as depicted in FIG. 16D.

FIGS. 16B-16D are examples of screenshots from the edge analysis moduleshowing the results of comparing three parameters along three rows offifteen adjacent pixels from different parts of the display (therespective pixel data from the three rows are represented by thedifferent shaded data points in the figures). In the graphs, the x-axisshows distance (in millimeters) from the edge of the display. FIG. 16Bplots pixel asymmetry with distance from the edge of the display. FIG.16C plots whole pixel average film thickness in nanometers from the edgeof the display. FIG. 16D plots +/−10 nm aperture percentage from theedge of the display.

From graphs such as those in the exemplary embodiments of FIGS. 16A-16D,various information regarding the display is conveyed. For example,differences between the parameters (and thus behavior when driven) ofpixels near the edge of the display versus those closer to the centercan be assessed. Also, by choosing different rows of pixels in differentportions of the display, such as the differing rows depicted in FIG. 15,differences in portions of the display also may be detected. The datamay also be used to determine if different color pixels have differentparameters than other color pixels.

Once such information is assessed, it may be used as a quality controlparameter, to accept or reject a substrate based on set (predetermined)levels of deviation of parameters of edge pixels relative to morecentrally located pixels. Further, such information may be used toadjust processing conditions to reduce or eliminate any undesirable edgeeffects observed, or undesirable effects of other locations of thedisplay.

For the module discussed above with reference to FIGS. 15-16, the numberof pixels and where the pixels are located are selectable by a user, andneed not be chosen as adjacent pixels in a row or column. For example, aseries of diagonal pixels may be selected and the relevant parameterscalculated and displayed. Moreover, the pixels need not be adjacent, butrather a sequence of any pixels with appropriate profiling data can beselected by a user, input to the module, and processed.

FIG. 17 depicts an alternative layout 1700 of interactive graphs, maps,tables, and widgets displaying profile analysis that may be displayeddepending on the pixels that are selected for analysis. For example,when pixels in a column, rather than a row, are selected, the aspectratio of the displayed interface may be automatically altered so thatthe presented data is not distorted. The screen shot of FIG. 17 depictspixels in a column and the adjusted orientation of a profile analysismodule (compare to FIG. 2A). The user is thus presented with thegraphical information in a format that does not distort the graphicaldata when differing orientations of pixels are selected for analysis. Inan exemplary embodiment, the automatic scaling and adjustment of thelayout may be overridden, in which case the data and graphics shown willbe in the standard layout and aspect ratio.

Various applications of the methods, techniques, and interfacesdescribed within this disclosure can be used to implement qualitycontrol standards for manufacturing of electronic displays. For example,x-y-z data may be received for an electronic display panel comprising apattern of spaced banks. Parameters such as bank depth, bank pitch, bankheight, bank slope, and bank opening size may be extracted from thex-y-z data. The extracted parameters may be compared to a qualitycriteria to determine whether the electronic display panel meets thequality criteria.

In an exemplary embodiment, the quality criteria may comprise one ormore of a bank depth range, a bank pitch range, a bank height range, abank slope range, and a bank opening size range. The extractedparameters for the electronic display panel may be compared to thequality criteria to determine whether the parameters fall within thecorresponding ranges. When the parameters fail to meet the qualitycriteria, the electronic display panel may be discarded as inkdeposition on the panel would waste resources at least because theparameters of the panel indicate it would not produce a viableelectronic display. When the parameters meet the quality criteria, filmlayers may be deposited on the electronic display panel to produce aviable product, such as an OLED display.

In addition, analyzed data for film layers on the electronic display maybe used to determine quality control metrics for various film layermaterials (e.g., ink products), deposition techniques, and othermanufacturing techniques described in this disclosure. For example, thefilm profile, thickness, and uniformity are related to processconditions for manufacturing. By monitoring the evolution of theseparameters using a design of experiments (DOE) methodology,manufacturing processes may be better controlled and updated. A processmay be established where routine measurement is used to determine thestability of the process and improve quality. For example, drift from atarget profile, thickness, and uniformity can be an indication of lossof quality, and may be assessed for changing process conditions.

In various exemplary embodiments, a method of analyzing film on asubstrate may comprise receiving 3-dimensional data obtained frommeasurements of a substrate comprising a plurality of banks andextracting a plurality of parameters for the substrate from the received3-dimensional data comprising one or more of bank depth, bank pitch,bank height, bank slope and bank opening size. The method may furthercomprise comparing the plurality of parameters to a criteria anddetermining whether the substrate meets a quality control standard basedon the comparing.

The method may further comprise discarding the substrate when thecomparison indicates the extracted parameters fail to meet the criteria,or depositing one or more film layers on the substrate when theextracted parameters meet the criteria. The criteria may comprise bankdepth range, a bank pitch range, a bank height range, and a bank slope.The criteria may comprise a bank depth range for individual banks, abank pitch range for individual banks, a bank height range of individualbanks, and a bank slope range for individual banks.

The method may further comprise calculating one or more of an averagebank depth, an average bank pitch, an average bank height, an averagebank slope and an average bank opening size based on the extractedplurality of parameters. The method may also comprise extracting one ormore of bank depth, bank pitch, bank height, bank slope and bank openingsize for individual banks of the substrate. Determining whether thesubstrate meets the quality control standard may further comprisedetermining a number of individual banks that fail to meet the criteria,or determining that the substrate fails to meet the quality controlstandard when the number of individual banks that fail to meet thecriteria exceeds a threshold associated with the quality standard.

In various exemplary embodiments, a method of analyzing film on asubstrate using data generated by any of a number of measurement sourcesmay comprise receiving 3-dimensional data obtained from measurements ofa plurality of spaced pixels on a substrate, the plurality of pixelscomprising one or more film layers, wherein the 3-dimensional data isobtained from any one of a laser scanner, a confocal microscope, anoptical profilometer or a mechanical profilometer. The method mayfurther comprise extracting a plurality of parameters from the received3-dimensional data comprising at least an average thickness for the filmlayers of the pixels, one or more area aperture ratios for the filmlayers of the pixels, and a pitch between pixels, wherein the extractionis based on a predetermined pattern for the pixels on the substrate; anddisplaying a user interface graphically representing one or more of theparameters for one or more film layers of the one or more of the pixels,the graphical user interface being interactive such that user inputdynamically modifies the graphical representation of the one or moreparameters.

Various exemplary embodiments contemplate a method of analyzing film ona substrate that comprises receiving three-dimensional data obtainedfrom measurements of a plurality of pixels of a substrate, the pluralityof pixels comprising one or more film layers; extracting a plurality ofparameters from the received three-dimensional data, the parameterscomprising at least a height for the film layers of the pluralitypixels, wherein the extraction is based on a predetermined pattern forthe pixels on the substrate; displaying a user interface graphicallyrepresenting at least a height for the film layers of one of theplurality of pixels; and displaying a graphical representationillustrating a height for a plurality of different film layers of theone pixel, the plurality of film layers including at least one of anunderlayer, a printed layer, and a difference layer between theunderlayer and the printed layer.

The graphical representation can illustrate at least a point at whichthe difference layer reaches a zero height or at least a point at whichthe underlayer and printed layer converge.

The method of claim may further comprise displaying a heat map of theone pixel, the heat map illustrating a height for the film layers of theone pixel and/or dynamically modifying the graphical representation ofthe height of the plurality of different film layers in response userinput at the display, the dynamically modifying causing the displayedgraphical representation to appear as continuously changing.

In an embodiment, the graphical representation may further comprise atwo-dimensional graphical representation of one of the pixels and aninteractive cursor for pointing to a location on the two-dimensionalgraphical representation, wherein user input that moves the cursor to anew location dynamically changes the graph to illustrate the height ofthe film layers at the new location. The cursor may be a cross-hair oftwo orthogonal lines that is movable by the user.

In another exemplary embodiment, the graphical representation is a graphand the two-dimensional graphical representation of the one pixel andthe cross-hair are aligned with the graph illustrating at least theheight of the film layers at the location of the one pixel pointed to bythe cross-hair such that at least one of the orthogonal lines of thecross-hair intersects with a graphed line of the graph representing theheight of the film layers at a precise location of the graph line thatcorresponds to the height of the film layers at the location of the onepixel pointed to by the cross-hair.

The exemplary embodiments can be used with any size display and moreparticularly with small displays having a high resolution. For example,exemplary embodiments of the present disclosure can be used withdisplays having a diagonal size in the range of 3-70 inches and having aresolution greater than 100 ppi, for example, greater than 300 ppi.

Although various exemplary embodiments described contemplate utilizinginkjet printing techniques, the various pixel and sub-pixel layoutsdescribed herein and the way of producing those layouts for an OLEDdisplay can also be manufactured using other manufacturing techniquessuch as thermal evaporation, organic vapor phase deposition, organicvapor jet printing, spin coating, slot coating, etc. Moreover, asdiscussed above, other the analysis techniques described herein can beused for display technologies other than OLED, and also may be used forany number of applications involving deposition of film layers on asubstrate, such as, for example, in printed circuitry andsemiconductors. Although only a few exemplary embodiments have beendescribed in detail above, those skilled in the art will readilyappreciate that many modifications are possible in the exampleembodiments without materially departing from this disclosure.Accordingly, all such modifications are intended to be included withinthe scope of this disclosure as defined in the following claims.

It is to be understood that the various embodiments shown and describedherein are to be taken as exemplary. Elements and materials, andarrangement of those elements and materials, may be substituted forthose illustrated and described herein, and portions may be reversed,all as would be apparent to one skilled in the art after having thebenefit of the description herein. Changes may be made in the elementsdescribed herein without departing from the spirit and scope of thepresent disclosure and following claims, including their equivalents.

Those having ordinary skill in the art will recognize that variousmodifications may be made to the configuration and methodology of theexemplary embodiments disclosed herein without departing from the scopeof the present teachings.

Those having ordinary skill in the art also will appreciate that variousfeatures disclosed with respect to one exemplary embodiment herein maybe used in combination with other exemplary embodiments with appropriatemodifications, even if such combinations are not explicitly disclosedherein.

It will be apparent to those skilled in the art that variousmodifications and variations can be made to the devices, methods, andsystems of the present disclosure without departing from the scope ofthe present disclosure and appended claims. Other embodiments of thedisclosure will be apparent to those skilled in the art fromconsideration of the specification and practice of the disclosuredisclosed herein. It is intended that the specification and examples beconsidered as exemplary only.

What is claimed is:
 1. A method of analyzing film on a substrate, themethod comprising: receiving surface profile data obtained frommeasurements of a plurality of discrete regions on a substrate, theplurality of discrete regions comprising one or more film layers;extracting a plurality of parameters from the received surface profiledata, the plurality of parameters comprising at least an averagethickness for the one or more film layers of the plurality of discreteregions, one or more area aperture ratios for the one or more filmlayers of the plurality of discrete regions, and a pitch between theplurality of discrete regions, wherein the extracting is based on apredetermined pattern for the plurality of the discrete regions on thesubstrate; and displaying a user interface comprising: a plurality ofindividual graphs each illustrating one or more parameters of theplurality of parameters for a corresponding subset of the plurality ofdiscrete regions; and a composite graph illustrating the one or moreparameters of the plurality of parameters for each discrete region ofthe plurality of discrete regions, wherein the composite graphcorresponds to the plurality of individual graphs being overlaidtogether.
 2. The method of claim 1, further comprising: receiving, froma user, a selection of the corresponding subset of the plurality ofdiscrete regions.
 3. The method of claim 2, wherein the receiving theselection of the corresponding subset comprises receiving a selection ofa number of columns and a number of rows of discrete regions to bedisplayed, and wherein the plurality of individual graphs are arrangedin a grid having a number of columns equal to the selected number ofcolumns and a number of rows equal to the selected number of rows. 4.The method of claim 1, wherein the one or more parameters illustrated bythe plurality of individual graphs and the composite graph include aheight of the one or more film layers.
 5. The method of claim 1, furthercomprising calculating an average film layer height for the one or morefilm layers of each of the plurality of discrete regions, wherein anindication for the average film layer height is displayed on theplurality of individual graphs and the composite graph.
 6. The method ofclaim 1, wherein the composite graph comprises graphed linesillustrating a height of the one or more film layers for each of theplurality of discrete regions, each of the graphed lines in thecomposite graph corresponding to a graphed line in one of the pluralityof individual graphs.
 7. The method of claim 1, further comprising:receiving, from a user, a selection of one of the plurality ofindividual graphs; and highlighting in the composite graph a graphedline that corresponds to the selected individual graph.
 8. The method ofclaim 1, wherein each of the plurality of individual graphs comprises agraphed line, the graphed lines of the plurality of individual graphshaving differing colors from each other, and wherein the composite graphcomprises graphed lines corresponding respectively to the graphed linesof the plurality of individual graphs, wherein each of the graphed linesin the composite graph has a same color as the corresponding graphedline in the plurality of individual graphs.
 9. The method of claim 8,wherein each of the graphed lines of the individual graphs illustrates aheight for the one or more film layers for the corresponding subset ofthe plurality of discrete regions.
 10. The method of claim 1, whereineach of the plurality of discrete regions defines one or more pixels ofa display.
 11. The method of claim 1, wherein the plurality of discreteregions define, respectively, individual subpixels of a display.
 12. Themethod of claim 1, wherein the plurality of discrete regions define,respectively, individual pixels of a display.
 13. The method of claim 1,wherein the one or more film layers comprise an organic light emittinglayer.
 14. The method of claim 1, further comprising: comparing the oneor more parameters to a quality criteria; and determining whether thesubstrate meets a quality control standard based on the comparing. 15.The method of claim 14, further comprising adjusting a process offorming the one or more film layers on the substrate based on thecomparing.
 16. The method of claim 15, wherein adjusting the process offorming the one or more film layers comprises adjusting a process offorming one or more OLED film layers on the substrate.
 17. A method ofanalyzing film on a substrate, the method comprising: receiving surfaceprofile data obtained from measurements of a plurality of discreteregions on a substrate, each of the plurality of discrete regionscomprising one or more film layers; extracting a plurality of parametersbased on the received surface profile data, the plurality of parameterscomprising at least an average thickness for the one or more film layersof the plurality of discrete regions, one or more area aperture ratiosfor the one or more film layers of the plurality of discrete regions,and a pitch between the plurality of discrete regions, wherein theextracting is based on a predetermined pattern for the plurality ofdiscrete regions on the substrate; displaying a graphical representationof one or more of the parameters for one or more film layers of one ormore discrete regions of the plurality of discrete regions; comparingthe one or more parameters to a quality criteria; and determiningwhether the substrate meets a quality control standard based on thecomparing.
 18. The method of claim 17, further comprising adjusting aprocess of forming the one or more film layers on the substrate based onthe comparing.
 19. The method of claim 18, wherein adjusting the processof forming the one or more film layers comprises adjusting a process offorming one or more OLED film layers on the substrate.
 20. The method ofclaim 17, wherein determining whether the substrate meets a qualitycontrol standard comprises determining whether the substrate meets aquality control standard for an electronic display.
 21. The method ofclaim 17, wherein determining whether the substrate meets a qualitycontrol standard comprises determining whether the substrate meets aquality control standard for an OLED display.
 22. The method of claim17, further comprising: in a case where the extracted parameters meetthe quality criteria, further processing the substrate for producing anelectronic display; or in a case where the extracted parameters do notmeet the quality criteria, rejecting the substrate for furtherproduction of an electronic display.
 23. The method of claim 17, whereinthe graphical representation includes a heat map of the one or morediscrete regions based on the one or more of the parameters for one ormore film layers.
 24. The method of claim 23, wherein the graphicalrepresentation further includes a first graph of the one or more of theparameters, a first axis of the first graph corresponding to a firstdimension of the heat map.
 25. The method of claim 24, wherein thegraphical representation further includes a second graph of the one ormore of the parameters, a second axis of the second graph correspondingto a second dimension of the heat map.
 26. The method of claim 25,wherein the graphical representation further comprises a cursor in theheat map, a vertical line in the first graph that is aligned with thecursor, and a horizontal line in the second graph that is aligned withthe cursor.
 27. The method of claim 26, wherein movement of the cursorwithin the heat map results in movement of the vertical line within thefirst graph and movement of the horizontal line within the second graphso as to keep the vertical line and the horizontal line aligned with thecursor.
 28. The method claim 27, wherein the heat map and the firstgraph are arranged such that a point at which the vertical lineintersects a graphed line in the first graph indicates a value of theone or more parameters at a location pointed to by the cursor in theheat map.
 29. The method claim 28, wherein the heat map and the secondgraph are arranged such that a point at which the horizontal lineintersects a graphed line in the second graph indicates a value of theone or more parameters for a location pointed to by the cursor in theheat map.